Ophthalmic lenses, sensors, and sunglasses, among other things, are commonly made of polymer materials. Therefore, polymer optics is a growing market mainly for medium quality but also for precision optics. Polymer optics are usually produced in an injection molding process. Due to high quality requirements on the final product, the manufacturing process of the molds has to be very accurate and precise. Thus the master tool has to be fabricated to a high quality with regard to shape accuracy and roughness. The focus of this article is on the process chain for the fabrication of molds for polymer optics and the finite element simulation of this process.