Nanometre scale reactive ion etching of GaN epilayers

D. Coquillat*, S. K. Murad, A. Ribayrol, C. J.M. Smith, R. M. De La Rue, C. D.W. Wilkinson, O. Briot, R. L. Aulombard

*Corresponding author for this work

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11 Citations (Scopus)

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Material Science