Micro-manufacturing: research, technology outcomes and development issues

Y. Qin, A. Brockett, Y. Ma, Akhtar Razali, J. Zhao, C.S. Harrison, W. Pan, X. Dai, D. Loziak

Research output: Contribution to journalArticle

Abstract

Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in micro-manufacturing is also in non-MEMS-based manufacturing. Research and technological development in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project.
Original languageEnglish
Pages (from-to)821-837
Number of pages17
JournalInternational Journal of Advanced Manufacturing Technology
Volume47
Issue number9-12
DOIs
Publication statusPublished - Apr 2010

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MEMS
Macros

Keywords

  • manufacuring technology
  • micro-product
  • nano-manufacturing
  • process chains

Cite this

Qin, Y. ; Brockett, A. ; Ma, Y. ; Razali, Akhtar ; Zhao, J. ; Harrison, C.S. ; Pan, W. ; Dai, X. ; Loziak, D. / Micro-manufacturing: research, technology outcomes and development issues. In: International Journal of Advanced Manufacturing Technology. 2010 ; Vol. 47, No. 9-12. pp. 821-837.
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Micro-manufacturing: research, technology outcomes and development issues. / Qin, Y.; Brockett, A.; Ma, Y.; Razali, Akhtar; Zhao, J.; Harrison, C.S.; Pan, W.; Dai, X.; Loziak, D.

In: International Journal of Advanced Manufacturing Technology, Vol. 47, No. 9-12, 04.2010, p. 821-837.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Micro-manufacturing: research, technology outcomes and development issues

AU - Qin, Y.

AU - Brockett, A.

AU - Ma, Y.

AU - Razali, Akhtar

AU - Zhao, J.

AU - Harrison, C.S.

AU - Pan, W.

AU - Dai, X.

AU - Loziak, D.

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KW - manufacuring technology

KW - micro-product

KW - nano-manufacturing

KW - process chains

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