Abstract
Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in micro-manufacturing is also in non-MEMS-based manufacturing. Research and technological development in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project.
Original language | English |
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Pages (from-to) | 821-837 |
Number of pages | 17 |
Journal | International Journal of Advanced Manufacturing Technology |
Volume | 47 |
Issue number | 9-12 |
DOIs | |
Publication status | Published - Apr 2010 |
Keywords
- manufacuring technology
- micro-product
- nano-manufacturing
- process chains