Micro-manufacturing: research, technology outcomes and development issues

Y. Qin, A. Brockett, Y. Ma, Akhtar Razali, J. Zhao, C.S. Harrison, W. Pan, X. Dai, D. Loziak

Research output: Contribution to journalArticlepeer-review

193 Citations (Scopus)


Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in micro-manufacturing is also in non-MEMS-based manufacturing. Research and technological development in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project.
Original languageEnglish
Pages (from-to)821-837
Number of pages17
JournalInternational Journal of Advanced Manufacturing Technology
Issue number9-12
Publication statusPublished - Apr 2010


  • manufacuring technology
  • micro-product
  • nano-manufacturing
  • process chains


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