Micro-manufacturing: research, technology outcomes and development issues

Y. Qin; A. Brockett; Y. Ma; Akhtar Razali; J. Zhao; C.S. Harrison; W. Pan; X. Dai; D. Loziak

doi:10.1007/s00170-009-2411-2

Micro-manufacturing: research, technology outcomes and development issues

Y. Qin, A. Brockett, Y. Ma, Akhtar Razali, J. Zhao, C.S. Harrison, W. Pan, X. Dai, D. Loziak

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

193 Citations (Scopus)

Abstract

Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in micro-manufacturing is also in non-MEMS-based manufacturing. Research and technological development in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project.

Original language	English
Pages (from-to)	821-837
Number of pages	17
Journal	International Journal of Advanced Manufacturing Technology
Volume	47
Issue number	9-12
DOIs	https://doi.org/10.1007/s00170-009-2411-2
Publication status	Published - Apr 2010

Keywords

manufacuring technology
micro-product
nano-manufacturing
process chains

Documents and Links

10.1007/s00170-009-2411-2

Cite this

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abstract = "Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in micro-manufacturing is also in non-MEMS-based manufacturing. Research and technological development in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project. ",

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AU - Qin, Y.

AU - Brockett, A.

AU - Ma, Y.

AU - Razali, Akhtar

AU - Zhao, J.

AU - Harrison, C.S.

AU - Pan, W.

AU - Dai, X.

AU - Loziak, D.

PY - 2010/4

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AB - Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in micro-manufacturing is also in non-MEMS-based manufacturing. Research and technological development in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project.

KW - manufacuring technology

KW - micro-product

KW - nano-manufacturing

KW - process chains

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DO - 10.1007/s00170-009-2411-2

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JO - International Journal of Advanced Manufacturing Technology

JF - International Journal of Advanced Manufacturing Technology

SN - 0268-3768

IS - 9-12

ER -

Micro-manufacturing: research, technology outcomes and development issues

Abstract

Keywords

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